41. Method of Forming Etch Mask Using Particle Beam Deposition
Inventor(s): Nalin Kumar
Patent # 5,382,315 Filed: 09/13/95 Issued: 01/17/95
42. Multilevel Metallization Process for Electronic Components
Inventor(s): Ajay Krishnan and Nalin Kumar
Patent # 5,380,546 Filed: 06/09/93 Issued: 01/10/95
43. Field Emitter Device with Diamond Emission Tips
Inventor (s): Nalin Kumar
Patent # 5,341,063 Filed: 11/24/92 Issued: 8/23/94
44. Ionized Metal Cluster Beam Systems And Methods
Inventor(s): Nalin Kumar, Chenggang Xie, Rao Goruganthu and Mohammed Ghazi Patent # 5,331,172 Filed 09/29/94 Issued 07/19/94
45. Cylindrical Magnetron Sputtering System
Inventor(s): Nalin Kumar
Patent # 5,317,006 Filed 10/04/91 Issued 05/31/94
46. F. E. Device Using Randomly Located Nuclei as an Etch Mask
Inventor (s): Nalin Kumar
Patent # 5,312,514 Filed: 4/23/93 Issued: 5/17/94
47. Semiconductor Electrode Bumps By Metal Cluster Ion Deposition
Inventor(s): Nalin Kumar, Chenggang Xie, Rao Goruganthu and Mohammed Ghazi Patent # 5,290,732 Filed 06/09/92 Issued 03/01/94
48. Fabricating Integrated Resistors In High Density Substrates
Inventor(s): Nalin Kumar
Patent # 5,254,493 Filed 02/24/92 Issued 10/19/93
49. Pattering Metal on a Substrate Using Direct Write Deposition
Inventor(s): Nalin Kumar
Patent # 5,244,538 Filed 7/26/91 Issued 9/14/93
50. Method and Apparatus For Fabricating Superconducting Wire
Inventor(s): Nalin Kumar
Patent # 5,229,358 Filed 12/3/90 Issued 7/20/93
